Fluid delivery method

ABSTRACT

A fluid delivery method is provided wherein either liquid or gaseous fluid is provided from fluid dispenser manifolds, via nozzle plates associated therewith, on each side of a path of travel of articles being treated by the fluid, and wherein nozzle openings in a nozzle plates cooperate with transverse groove(s) to provide a screen flow of fluid extending transversely of the path of travel of articles, and directed toward the articles. In the case of the fluid being a liquid, the nozzle openings provide cylindrical filament-like columns of liquid which are rendered by the associated grooves into generally flat, transversely disposed screen spray of liquid. In the case of the fluid being a gas, the nozzle openings and transverse grooves cooperate to deliver the gas in transversely spaced apart, transverse, planar zones of gas directed toward the path of article travel. 
     In the case of liquid flow, the openings are generally cylindrical, and in the case of gas flow the openings are generally spaced-apart slotted holes. In the cases of both liquid and gas fluids, one of the grooves and/or nozzles are directed upstream relative to the path of article flow. Various adjustments are provided for adjusting the positions of the nozzle plates relative to the path of flow. 
     The nozzle plate has a removable portion, for ease of cleaning and the like, that contains the nozzle orifices, sealing connected to the nozzle base section. The transverse groove that connects the line of orifices can have its center line varied from the center line of the orifices, in the direction of the longitudinal path, and/or the groove can have its angular orientation varied such that the path of flow of fluid discharged can be at an angle other than 90° to the discharge surface of the nozzle plate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a division of Application Ser. No. 08/786,029 filed Jan. 21,1997, now U.S. Pat. No. 5,904,773, which, in turn is a continuation-inpart of Application Ser. No. 08/514,313 filed Aug. 11, 1995, now U.S.Pat. No. 5,614,264.

BACKGROUND OF THE INVENTION

In various wet processing arts involving chemical treatment, such asetching, electroplating and the like, it is known to deliver fluids ontosurfaces of articles being treated. In many instances, the articlesbeing treated are printed circuit boards and the like. Often sucharticles are being delivered along a generally horizontal path and areetched, cleaned, rinsed, activated, dried, etc., at various stationsalong the path. Sometime the articles being treated, if they are printedcircuit board, have bore holes extending therethrough and it is desiredto have the treatment fluid impinge not only on upper and lower surfacesof the boards, but also on bore holes. The treatment of the articles cantake place via nozzle arrangements, such as that set forth in U.S. Pat.No. 4,789,405, for example. In other instances the treatments may takethe form of various other fluid delivery, spraying, drying techniques,such as those disclosed in U.S. Pat. Nos. 4,576,685, 4,017,982,3,935,041, 3,905,827, or 3,776,800. Various drive techniques for drivingthe printed circuit boards or other articles through the varioustreatment stations may be used, such as those set forth in U.S. Pat. No.4,046,248 or the like.

Accordingly, the technical field of this invention is directed to amethod and arrangement for treating conductor substrates. Such treatmentprocesses can include the removal of liquid from through-holes inconductors boards and from its surface, drying the boards, in additionto cleaning, coating, rinsing, etching, activation and variouselectrolytic processes.

The present invention is directed toward efficient delivery of fluid toarticles being treated, and most particularly to conductor boards andthe like.

In connection with the fluid delivery, slotted tubes, for example havebeen used, but such are limited in development of the flow upon exitingthe orifice or slot, such that the flow stream may dissipate morequickly and lose some of its momentum, even orientally, as the distancefrom the substrate being treated increases.

Spray nozzles are also used, but such often require large amounts ofenergy relative to the fluid medium being processed. Additionally, insome instances spray nozzles do not provide the desired level ofuniformity in terms of coverage, with a higher percentage of flow andpressure being located at the center of the nozzle spray pattern, and alesser percentage of flow and pressure outwardly thereof, in that flowand pressure are often substantially reduced as the distance isincreased perpendicular to the centerline of the nozzle.

Fluid jet injectors have also been used to produce tight columns offlow, but also generally fail to provide a desired level of uniform andcomplete coverage of the article being treated. Additionally, smallinjectors require substantially higher pressure to maintain a desiredimpact of force on the article being treated, which high force impactmay not always be desirable.

SUMMARY OF THE INVENTION

The present invention provides a method and apparatus for delivering afluid to printed circuit boards or other articles being treated, as thearticles are delivered along a path of travel, by impinging the fluid onthe articles from both sides of their path of travel. During such travelfluid is dispensed from nozzles and directed via the nozzles themselvesand grooves that connect the nozzles, such that the fluid is provided inthe form of a transverse extended screen-like fluid flow from the nozzleopenings. The fluid delivered may be either liquid or gas. In the caseof a liquid, the nozzle openings disseminate the flow into cylindricalfilament-like columns of liquid flow, connected via the grooves into agenerally flat transversely disposed, planar screen spray of liquid. Inthe case of a gas fluid, such is provided via nozzle openings andtransverse grooves connecting rows of openings, which openings aretransversely spaced apart to facilitate disseminating from the openingsvia the grooves separate, spaced-apart, transversely aligned planarzones of gas flow directed toward the path of article travel.Optionally, a suction effect may be created by an upstream-convergingsurface of the nozzle.

Various adjustments are provided for the apparatus in accordance withthis invention. Additionally, various preferred parameters andstructural arrangements are utilized. In some cases a row of nozzleopenings is directed at an angle to the path of travel, aimed at theupstream direction of the path of travel.

Accordingly, it is a primary object of this invention to provide a novelmethod and apparatus for imparting fluid delivery to an article beingconveyed along a predetermined path.

It is a further object of this invention to accomplish above object,wherein the fluid delivery is gas for drying an article, such as aconductor board.

It is another object of this invention to accomplish the primary objectwherein the fluid delivery is a liquid fluid delivery, such as forrinsing, etching, etc.

It is another object of this invention to accomplish the above objects,wherein a readily removable nozzle section that contains the fluiddischarge or orifices is provided, for ready cleaning or the like ofthat nozzle section.

It is a further object of this invention to accomplish the aboveobjects, wherein variations are provided between transverse center linesof nozzles in a row and center lines of transverse groves that connectthe nozzles.

It is another object of this invention to accomplish the above objects,wherein the transverse grooves that connect the orifices of nozzles maybe at acute angles to the longitudinal path of flow of articles beingtreated.

Other objects and advantages will be readily understood upon a readingof the following brief description of the drawings, detailed descriptionof the preferred embodiments and the appended claims.

BRIEF DESCRIPTION OF THE DRAWING FIGURES

FIG. 1 is a longitudinal sectional, schematic view, taken through amulti-station apparatus in accordance with this invention, wherein aplurality of etching, rinsing, drying, operations are illustrated, andwherein means for imparting fluid delivery above and below articles suchas circuit conductors, are illustrated.

FIG. 2 is a schematic, perspective view of a circuit board conductorbeing delivered along its path between upper and lower fluid dispensermanifolds in accordance with this invention, with the manifolds being ofa type illustrated above and below the path of travel in FIG. 1.

FIG. 3 is an enlarged view of upper and lower fluid delivery manifoldsas shown in FIG. 1, with delivery plates thereof being shown in fulllines close to the path of article travel, and in phantom lines spacedmore so from the path of articles travel.

FIG. 4 is a view taken generally along the line of IV--IV of FIG. 3,showing the lower end of a nozzle plate surface of an upper manifold,fragmentally illustrated.

FIG. 5 is a longitudinal section taken generally along the line V--V ofFIG. 4, wherein two generally perpendicularly disposed nozzles areillustrated, with an angled nozzle being illustrated, disposedtherebetween.

FIG. 5A is an enlarged detailed view of one of the nozzles and itsassociated groove illustrated in FIG. 5, wherein the geometricarrangement thereof is more clearly shown.

FIG. 6 is a view similar to that of the liquid dispensing nozzle plateof FIG. 4, but with the nozzle plate of FIG. 6 being specificallyadapted for gas dispensing, such as drying air or the like.

FIG. 7 is a longitudinal sectional view similar to that of FIG. 5 buttaken generally along the line of VII--VII of FIG. 6.

FIG. 8 is an enlarged fragmentary longitudinal sectional view takenthrough an alternative gas delivery pair of manifolds disposed onopposite sides of a path of travel of articles being treated, whereinthe surfaces of the manifold plates closest to the path of travel areconverging in an upstream direction to facilitate suction of fluidconveyed for impinging surfaces of articles being treated.

FIG. 9 is a fragmentary longitudinal, sectional view, taken through anozzle plate in accordance with this invention, wherein a separatenozzle plate base section and nozzle plate removable section areillustrated, with seals along transverse dovetail joints.

FIG. 10 is an enlarged, fragmentary, vertical sectional view, takengenerally along the line X--X of FIG. 9, and wherein an end plate isillustrated, sealingly connecting the nozzle base section and nozzleremovable section.

FIG. 11 is an enlarged, fragmentary vertical, longitudinal sectionalview taken through a nozzle orifice and groove in accordance with thisinvention.

FIG. 12 is view similar to that of FIG. 11, but wherein a cylindricalcolumn of fluid (preferably liquid) being discharged from the nozzle isdiagrammatically illustrated.

FIG. 13 is a view similar to that of FIG. 12, but wherein thediagrammatically illustrated column of fluid is at an acute angle to thepath of article flow (or generally horizontal surface of the nozzleplate), and wherein the transverse groove is at a center line differentfrom that of the center line connecting nozzle orifices transverse ofthe nozzle plate.

DETAILED DESCRIPTIONS OF THE PREFERRED EMBODIMENTS

Referring now to the drawings now in detail, reference is first made toFIG. 1, in which a fluid treatment system for articles being conveyed isgenerally designated by the numeral 10. In this embodiment, the articlesbeing conveyed are printed circuit boards or the like 11, withthrough-holes such as 12 extending there through, with connectingportions 13 functioning as conductors along portions of the boards, asshown in FIG. 2.

In FIG. 1, a plurality of stations 14, 15 and 16 are illustrated, withstation 14 functioning perhaps as an etching chamber wherein a suitableetchant may be dispensed onto appropriate surfaces of a printed circuitboard or the like, followed perhaps by a rinsing station 15, in whichthe etchant liquid (or other treatment fluid) would be rinsed from thearticles 11 by means of fluid dispensers 17,18, followed by passage ofthe articles into another station 16, which may for example be a gastreatment station such as an air drying station wherein air is dispensedvia dispensers 20,21 which, like the dispensers 17,18, are disposed onopposite sides of a path of travel 22 for articles being conveyedthrough the apparatus of the system 10, as shown, from left to right, inthe direction of the arrows 23.

Each of the stations 14-16 are provided with upper and lower walls,24,25, side walls 26, inlet and outlet walls 27,28 with appropriateinlet and outlet openings 30,31, respectively.

The path 22 of travel of the articles 11 is therefore a longitudinalpath of travel through the machine and in the embodiment shown, the path22 is generally horizontal.

Appropriate drive rollers 32 are provided, generally shaft-mounted ontransversely disposed shafts, which in turn are driven by any suitablemeans, such as a drive means for example as shown in U.S. Pat. No.4,015,706.

In instances particularly where the treatment fluid in a given stationis liquid, such as for the station 15, an appropriate liquid dischargeline 33 may be provided, for discharge for recycling or the like, asdesired.

With reference to FIG. 2, in particular, the article 11 is shown beingdelivered substantially horizontally in the direction of arrow 23,beneath a dispenser 17 and above a dispenser 18, it being understoodthat FIG. 2 could equally well represent dispensers 20,21 as desired.

With reference to FIG. 3, it will be seen that the upper dispenser 17 isdisposed above the lower dispenser 18 for conveyance of articles 11therebetween in a longitudinal, generally horizonal path of travel, asshown.

The dispenser 17 includes a manifold 35 which receives treatment liquidvia a inlet tube 36 or the like, for delivery down through the manifold35, through a manifold transition plate 37 having a large number ofspaced apart transition holes 38 therein, arranged in a row, whichextends transversely, substantially between sidewalls 26 of theapparatus as shown in dotted lines in FIG. 3. The fluid thus deliveredvia conduit 36 and manifold transition holes 38 is thus delivered to amulti-port fluid dispenser nozzle plate 40. The nozzle plate has aplurality of fluid dispenser nozzle openings 41, 42 and 43, arranged intransverse rows, perpendicular to the longitudinal path of travel 22 forarticles 11, and extending generally the transverse length of themanifold 17, substantially completely between opposed sidewalls 26 ofthe apparatus.

A pair of article-engaging rollers 44,45 are provided, carriedindirectly (by means not shown) by the manifold 17, respectivelyshaft-mounted at 46,47, to engage against an upper surface 48 of anarticle 11 being treated. The purpose of the upper and lower rollers44,45 is to resist the forces of impingement of fluid being delivered toan article 11 being treated via a manifold on the opposite side of thepath of travel 22. Thus, fluid delivered via lower dispenser 18 wouldimpart an upward component of motion to the article 11 being treated asshown in FIG. 3, but for the resistance applied by the rollers 44,45 inengagement with an upper surface 48 of the article 11. Conversely, fluiddelivered from upper dispenser 17 onto an upper surface 48 of thearticle 11, would be resisted by the presence of lower rollers(unnumbered) carried by the dispenser 18.

In order to accommodate different thicknesses of article 11, thedispensers 17,18, are vertically adjustable by any suitable means, suchthat their dispenser nozzle plates 40 may move, for example, between thefull line positions therefor shown in FIG. 3, to the phantom linepositions shown therefor, for accommodating, for example, a thickerarticle 11, while still maintaining a desired predetermined smallspacing between the surface of the plate 40 (for example the lowersurface thereof as shown in FIG. 3) and the adjacent surface of thearticle 11 (for example, the upper surface 48 as shown in FIG. 3).

The means for adjusting the positions of the dispensers 17,18 toward andaway from the path 22 of article travel can be any suitable means. Arepresentative means is shown whereby an adjustable positionable member50 is threadedly mounted through a fixed plate member 51, to supporttransversely extending posts 52 at opposite transverse ends of thedispenser 17, whereby turning the threaded member 50 may move thedispenser 17 from the full line position shown for the post 52 in FIG.3, to the phantom line position shown therefor also in FIG. 3, formovement of the plate 40 between the full line and phantom positionsdescribed above. It will be understood that any suitable adjustmentmeans may be provided for changing the relative positions of thedispensers.

In the case where the path of travel 22 is a substantially horizontalpath as shown, and wherein the rollers 44,45 for the upper manifoldengage an upper surface 48 of articles 11 being treated, the weight ofthe rollers 44,45 may be used to provide the hold-down of the article 11being treated in resisting upwardly directed flow from the dispenser 18.In such an instance, the shafts, 46,47 for the rollers 44,45,respectively, may be mounted in vertical slotted holes 53,54, as shown.

Also, it will be noted, with reference to FIG. 4 that a plurality ofspaced apart notches 55, spaced generally along the plates 40 betweensidewalls 26, may accommodate rollers, 44,45, passing therethrough, asshown in FIG. 3, with clearance, so as not to engage portions of theplate 40 defined by the notches 55. Such allows close placement of therollers 44,45 to the openings 41, 42 and 43 and similar openings on theopposite (lower) side of the path of travel 22 in the nozzle plate ofthe dispenser 18.

It will be apparent from FIG. 3 that the construction, operation,adjustment, etc. of the dispenser 18 is substantially the same as thatof 17, so the description thereof will not be duplicated herein.However, with the operation of the dispensers above and below the path22 of article travel, it would generally not be necessary to provideslotted holes such as those 53 and 54 for facilitating (upward ordownward) vertical movement of the posts that mount the lower rollerstherein; that the phenomena described above with respect to the upperrollers 44,45 and their ability to move upward in slotted holes 53,54,is a function of utilizing gravity to assure contact of the upperrollers on the upper surface 48 of the article 11.

It will also be apparent that, except for the details of discharge offluid through the nozzle plates, the dispensers 20,21 will generally beconstructed similar to and mounted similarly to, the dispensers 17 and18 such that the description provided above for the dispenser 17 appliesequally well here too.

With reference to the illustration for the nozzle plate 40 illustratedin FIG. 4, it will be seen that the plate 40 while being shownfragmentally cut-off at the lower end thereof, actually extendssubstantially completely between sidewalls 26 of the apparatus.

The plate 40 is shown to have upper and lower surfaces 55,56, withchamfered upstream and downstream lower surface portions 57 and 58,respectively. The chamfered surface portion 57 facilitates article inletbetween a pair opposing plates 40, and the chamfered surface 58facilitates air inlet into the partial vacuum created by an eductioneffect caused by the forward or upstream directed flow from anglednozzles 60 located in rows between straight nozzles 61, 62 as will bediscussed in more detail hereinafter. Such eduction of air would be inthe direction indicated by the arrow 63 in FIG. 5 to fill the partialvacuum created by liquid being discharged via angled nozzles 60, and tofacilitate the flow of liquid 60 across the upper surface of a printedcircuit board or other article being conveyed from an upstream directionto a downstream direction, pursuant to arrow 64 in FIG. 5.

The nozzles 61, it will seen, are arranged in a row extendingtransversely of the longitudinal path of travel, and are orientedgenerally perpendicular to the longitudinal path of travel 22. Eachnozzle 61 in the row is comprised of a larger diameter cylindrical blindhole zone 65 at the upper end, which joins a cylindrical tapered zone66, therebeneath, which in turn communicates with a transverse groove67. The transverse groove runs completely along the lower surface 56 ofthe plate 40, connecting the nozzle openings of nozzle zone 66, as shownin FIG. 4. The cylindrical taper "a" of zone 66 is in the range of 100°to 160° across its diameter, and most preferably is approximately 120°.The transverse groove 67 has an included angle "b" as shown in FIG. 5A,within the range of 30° to 90°, and most preferably is approximately60°.

The pressure applied to the liquid being disseminated via nozzle 61 andthe spacing apart of the nozzles 61 are selected to develop the flow ofliquid emanating from the group of nozzles 61 in the transverse rowshown, to produce from the nozzles 61 a generally cylindricalfilament-like column 68 of liquid, with the groove 67 connecting aplurality of small columns of liquid into a generally flat, transverselydisposed, planar screen spray of liquid, such that the groove 67facilitates a fan spray of liquid from the individual nozzles 61 into ascreen as described. Preferably, in addition to the row of nozzles 61,there is an identical, or substantially identical row of nozzles 62disposed downstream thereof, also downstream of angled nozzles 60 aswill hereinafter be described. Each nozzle 60 is generally similar tothe nozzle 61 having a blind bore like that 65 for the nozzle 61, whichmeets a cylindrical taper at the lower end thereof, which in turn meetsa connecting groove 70, connecting a plurality of nozzles 60, exceptthat the connecting groove 70 and the several zones of the nozzles 60are angled for liquid discharge in an upstream direction, at an angle"c" to the horizontal as shown in FIG. 5, which angle is preferablyabout 75°. It will be noted that it is the upstream directed spray vianozzles 60 that create the partial vacuum for flow of air in thedirection of 63, for facilitating dissemination of liquid from thenozzles 60, 61 and 62 in an upstream direction or against the directionof flow of articles along their path.

With reference now to FIG. 6 and 7, the multi-port gas dispenser nozzleplates associated with the gas dispensing (generally air) station 16 areshown. Aside from the nozzle plates 74, the rest of the dispensers of20,21 will generally be constructed along the lines of those 17,18, asaforesaid. Each nozzle plate 74, has a plurality of notches 75 whichfunction as aforesaid for the notches 55 of the plate of FIG. 4.Additionally, each plate 74 likewise extends transversely of theapparatus between sidewalls 26, and has upper and lower surfaces 76,77,and lower chamfered upstream and downstream surface portions 78,80,pursuant to the embodiment discussed above.

However, the plate 74 is provided with a plurality of slotted holes 81arranged in a transverse row along the plate 74, as shown. The slottedholes are separated by a plurality of transverse spacings 82. Theslotted holes 81 are connected by a transverse groove 83 in the lowersurface 77 of the plate 74. The groove 83 is perpendicular to thelongitudinal path of flow of articles passing therebeneath, and is of adepth as measured upwardly from the surface 77 that is within a range of1 to 4 times the width of the slotted holes 81 as measured in thelongitudinal direction (shortest slotted hole dimension), whenpreferably sized.

The groove 83 facilitates maintaining the discharge of air or other gasthrough each of the slotted holes 81, to remain of a width that isevidenced by the dimension "d" in FIG. 6, so that air emanatingdownwardly therefrom as shown, in the direction of the arrow 84,perpendicular to the path 22 of flow of articles therebeneath will be inthe form of a plurality of transversely spaced apart, transverselyoriented, planar zones of gas flow.

A plurality of nozzles 85 are also provided in a transverse row, asshown in FIGS. 6 and 7, similarly comprising slotted holes spaced apartfrom each other as shown, also arranged to emanate therefrom, withrespect to each slotted hole, a transversely spaced apart transverse,planar zone of gas flow directed toward the path of article travel, oftransverse dimension "d". However, the direction of flow of the air orother gas emanating from the nozzles 85, has an upstream component ofdirection, because of the orientation provided by the angled cut "e"shown in FIG. 7, whereby the groove 86 is cut into the surface 77 at anangle "e", of approximately 30°.

Additionally, it will be noted that the slotted holes 85 in their rowaligned with groove 86, are "staggered", relative to the slotted holes81 in their row aligned with their groove 83, such that the slottedholes 85 are longitudinally aligned with spacings 82, and slotted holes81 are longitudinally aligned with spacings 89. Thus an article beingtreated with air or other gas flow does not initially meet an unbrokensingular screen of air as it passes beneath the slotted holes 81, butrather, sees a plurality of parallel vertical planar screens of air, andnext sees a plurality of screens of air via the slotted holes 85, alonglongitudinal imaginary ribbons 90 of areas on the surface of the articlebeing treated (see FIG. 2).

It will also be noted that in FIGS. 6 and 7, there is shown a pluralityof cylindrical holes 92, connected by a groove 93 in the lower surface77, which facilitate additional gas flow over the articles beingtreated. Additionally, another optional row of cylindrical holes 94 maybe provided on the downstream end of the plate 94, extendingperpendicular to the path of flow 22 of articles passing therebeneath,also connected by a transverse groove 95, as shown in FIG. 7. It will benoted that the holes 94 and grooves 95 are not shown in FIG. 6, in thatthe same are provided as an option, only.

With reference now to FIG. 8, an alternative arrangement is provided forgas or other air discharge dispensers 120,121, in the form of upper andlower nozzle plates 174 carried by associated manifolds. The rows ofslotted holes 181,185 and their respective lower grooves 183,186 areessentially the same as those for the rows of slotted holes 81,85 andassociated grooves described above with respect to the embodiment ofFIGS. 6 and 7, so the same will not be duplicated herein. However, itwill be noted that the upstream orientation of air discharged via nozzleopenings 185 and associated groove 186 creates a partial vacuum as shownby the arrow 190. The lower surface 177 of the plate 174 in thisembodiment is sloped, rather than being parallel to the path of flow 22of articles being conveyed therepast, such that it converges from adownstream portion 180 thereof toward an upstream portion 178 thereof.Such convergence increases the velocity of flow of air past athrough-hole 200 in the article 111 being conveyed therepast. If theupper and lower slotted holes in upper and lower ones of the plates 174are staggered transversely, such that a given hole is impinged upon byair being discharged from either an upper or lower slotted hole, but notboth at the same time, a pumping action can be effected whereby air willpass either upwardly or downwardly through the slotted hole 200, but notin both directions at the same time. Such pumping action created by therelative placement of upper and lower slotted holes in upper and lowerplates 174, at higher velocities caused by the converging surfaces 177,and angled discharge groove 186, facilitate moving fluid upwardly anddownwardly through through-holes 200.

With reference now to FIGS. 9 and 10, it will be seen that a nozzleplate 300 is provided, being illustrated in longitudinal verticalsection, and being comprised of a nozzle base section 301 and aremovable nozzle section 302 disposed therein, with portions of thenozzle base section overlying portions of the removable nozzle sectionat 303 and 304, in transverse dovetail joint arrangements as shown inFIG. 9, with the joints 305, 306, formed thereby extending in atransverse direction, and with transverse elastomeric seals 307, 308, ofthe O-ring type being shown, sealing removable section 302 to the basesection 301, as shown. It will be seen that the nozzle orifices 310 arecontained within the removable nozzle section 302. Thus, fluid,preferably liquid, may flow upwardly in the nozzle as shown in FIG. 9,in the direction of the arrows 311, out of the orifices 310, in themanner described above.

However, the removable nozzle section 302 may be removed for cleaning orthe like, in the event that thin films of treatment materials, orscaling occurs, for ready cleaning of those portions of the nozzleplates that contain the orifices, without requiring substantialdisassembly of major portions of the equipment.

It will be apparent that while only a lower nozzle plate 300 isillustrated, an upper nozzle plate of the same general configurationwould normally be disposed thereabove, with the path of travel ofarticles being treated taking place therebetween, and running from leftto right, or right to left, as viewed in FIG. 9.

With reference to FIG. 10, it will be seen that end plates 312 areprovided at each end of the removable nozzle sections 302, generallyfastened to the nozzle base section 301 by means of suitable fasteners313, as shown, and with longitudinally disposed O-rings 314 carried bythe plates 312, generally connecting seals 307 and 308, such that theplate 302 is sealed entirely about its periphery. It will be apparentthat the seals 307, 308 and 314 may comprise individual seals, or thesame may comprise a single endless seal, as may be desired. Also, whileonly one end plate 312 and seal 314 is shown in FIG. 10, it will beunderstood that generally a comparable plate and seal would be providedon the opposite end of the removable plate section 302.

Thus, it will be apparent that the removable plate sections may readilybe removed for cleaning or the like, and they may readily bere-assembled into the equipment. Also, it will be apparent that thedovetail joints 305, 306, securely hold the removable sections 302 inopposition to the forces provided by fluid, generally liquid (oralthough the same may be gas) flowing in the direction of the arrows311.

With reference now to FIGS. 11-13, it will be seen that a nozzle plate400 is provided with a plurality of nozzles 401, connected by atransverse groove 402 extending into the orifices 404 at a depth 403,and having a longitudinal width D1, and the angled sides of the groove402 having an included angle "f" therebetween, as shown in FIG. 11. InFIG. 11, the center line of the groove 404 and the center line of thenozzle orifices or openings 404 are one and the same, at 405.

With reference to FIG. 12, it will be seen that the discharge of liquidfrom the orifices 404 of the nozzles, is along the center line 405,upwardly, as shown in the direction of the arrow 406, in the form of acolumn 407 of fluid diagrammatically illustrated as such in FIG. 12, andwould be the same for each of the many nozzle orifices 404 that areconnected by the transverse groove 402. The angle of discharge for thecolumn 407 is shown at "g", to be at 90° from the nozzle surface 408,which would be at the same angle "g" to the longitudinal path of flow ofarticles between pairs of nozzle plates 400.

With reference now to FIG. 13, it will be seen that the nozzle plate 500is constructed such that the transverse center line 505, connecting aplurality of discharge orifices 504 transversely of the equipment, is ata different location longitudinally of the path of flow of articles tobe treated by the equipment than the center line 509 of the transversegroove 502 that connects a plurality of nozzle orifices 504 transverselyof the equipment. Also, with respect to FIG. 13, it will be noted thatthe angle "h" to the horizontal surface 508 that the diagrammaticallyillustrated column 507 of fluid being discharged from nozzle orifices504, in the direction of the arrow 506, is seen to be acute, as shown inFIG. 13.

The distance between line 505 and 509 can vary, preferably within arange of 0.0 inches 0.020 inches, and the angle "h" can vary generallyfrom about 70° to about 90°.

It will be apparent from the foregoing that various modifications may bemade in the details of construction, as well as in the use and operationof the apparatus and method in accordance with this invention.

What is claimed is:
 1. A method of fluid treatment of articles beingconveyed along a pre-determined generally longitudinal path, comprisingconveying articles along a pre-determined longitudinal path from anupstream direction toward a downstream direction, and:(a) providing afirst fluid dispenser manifold arranged generally transverse to saidgenerally longitudinal path; (b) providing a second fluid dispensermanifold arranged generally transverse to said generally longitudinalpath; (c) disposing the first and second fluid dispenser manifoldsgenerally opposite each other with the longitudinal article paththerebetween; (d) with first and second fluid dispenser manifolds havingrespectively associated first and second multi-port fluid dispensernozzle plates; disposing the nozzle plates generally transverse of andadjacent to said path, with one said nozzle plate on each side of saidpath and terminating in a nozzle plate surface nearest said path; (e)with at least one of said first and second nozzle plates having at leastone generally transverse row of nozzle openings for dispensing fluidfrom an associated said manifold therethrough, into contact witharticles being conveyed along the predetermined path; (f) providingtransverse groove means extending transverse of said longitudinal pathalong said nozzle plate surface, and connecting the nozzle openings insaid nozzle plate surface nearest said path; (g) providing transverselyextending screen-like fluid flow from said nozzle openings via thetransverse groove means; and (h) with said nozzle plate being comprisedof a base section and a removable nozzle section, with said nozzleopenings being disposed in said removable nozzle section, and removingthe removable nozzle section from the base section.
 2. A method of fluidtreatment of articles being conveyed along a pre-determined generallylongitudinal path, comprising means for conveying articles along apre-determined longitudinal path from an upstream direction toward adownstream direction, and:(a) providing a first fluid dispenser manifoldarranged generally transverse to said generally longitudinal path; (b)providing a second fluid dispenser manifold arranged generallytransverse to said generally longitudinal path; (c) disposing the firstand second fluid dispenser manifolds generally opposite each other withthe longitudinal article path therebetween; (d) with the first andsecond fluid dispenser manifolds having respectively associated firstand second fluid dispenser nozzle plates; disposing the nozzle platesgenerally transverse of and adjacent to said path, with one said nozzleplate on each side of said path and terminating in a nozzle platesurface nearest said path; (e) with at least one of said first andsecond nozzle plates having nozzle openings for dispensing fluid from anassociated said manifold therethrough, into contact with articles beingconveyed along the predetermined path; and (f) with said nozzle platebeing comprised of a base section and a removable nozzle section, withsaid nozzle openings being disposed in said removable nozzle section,and removing the removable nozzle section from the base section forcleaning or the like.
 3. The method of any one of claims 1 and 2,wherein said base section of said nozzle plate and said removable nozzlesection of said nozzle plate are disposed adjacent each other along atleast one generally transverse joint.
 4. The method of claim 3,including providing an elastomeric seal in said joint, in sealingengagement between said base section and said removable nozzle section.5. The method of claim 3, including providing end plates along ends ofsaid base section and removable nozzle section, with elastomeric sealsbetween said end plates and adjacent portions of said removable nozzlesections.
 6. A method of fluid treatment of articles being conveyedalong a pre-determined generally longitudinal path, comprising conveyingarticles along a pre-determined longitudinal path from an upstreamdirection toward a downstream direction, and:(a) providing a first fluiddispenser manifold arranged generally transverse to said generallylongitudinal path; (b) providing a second fluid dispenser manifoldarranged generally transverse to said generally longitudinal path; (c)disposing the first and second fluid dispenser manifolds being disposedgenerally opposite each other with the longitudinal article paththerebetween; (d) with the first and second fluid dispenser manifoldshaving respectively associated first and second multi-port fluiddispenser nozzle plates; disposing the nozzle plates generallytransverse of and adjacent to said path, with one said nozzle plate oneach side of said path and terminating in a nozzle plate surface nearestsaid path; (e) with at least one of said first and second nozzle plateshaving at least one generally transverse row of nozzle openings fordispensing fluid from an associated said manifold therethrough, intocontact with articles being conveyed along the predetermined path; (f)providing transverse groove means extending transverse of saidlongitudinal path along said nozzle plate surface and connecting thenozzle openings in said nozzle plate surface nearest said path; (g)providing transversely extending screen-like fluid flow from said nozzleopenings via the transverse grooves means; (h) providing the transversegroove means having a transverse center line at first location alongsaid predetermined path; and (i) providing the row of nozzle openingshaving a transverse center line at a second location along saidpredetermined path, different from said first location.
 7. A method offluid treatment of articles being conveyed along a pre-determinedgenerally longitudinal path, comprising conveying articles along apre-determined longitudinal path from an upstream direction toward adownstream direction, and:(a) providing a first fluid dispenser manifoldarranged generally transverse to said generally longitudinal path; (b)providing a second fluid dispenser manifold arranged generallytransverse to said generally longitudinal path; (c) disposing the firstand second fluid dispenser manifolds generally opposite each other withthe longitudinal article path therebetween; (d) with the first andsecond fluid dispenser manifolds having respectively associated firstand second multi-port fluid dispenser nozzle plates; disposing thenozzle plates generally transverse of and adjacent to said path, withone said nozzle plate on each side of said path and terminating in anozzle plate surface nearest said path; (e) with at least one of saidfirst and second nozzle plates having at least one generally transverserow of nozzle openings for dispensing fluid from an associated saidmanifold therethrough, into contact with articles being conveyed alongthe predetermined path; (f) providing transverse groove means extendingtransverse of said longitudinal path along said nozzle plate surface andconnecting the nozzle openings in said nozzle plate surface nearest saidpath; (g) providing transversely extending screen-like fluid flow fromsaid nozzle openings via the transverse grooves means; and (h) providingtransverse groove means having an upstanding center line at an acuteangle to said longitudinal path.